公开(公告)号：AU1296001A

公开(公告)日：2001-09-12

申请号：AU1296001

申请日：2000-11-28

Applicant: IBM

Inventor： BEYELER RENE ,  BLOCHL PETER ,  BONA GIAN-LUCA ,  GERMANN ROLAND W ,  HORST FOLKERT ,  OFFREIN BERT J ,  SALEMINK HUUB L ,  WIESMANN DOROTHEA W

IPC: G02B6/12 ,  C01B21/082 ,  C01B21/087 ,  C03B19/14 ,  C03C1/02 ,  C03C3/04 ,  C03C3/11 ,  C23C16/30 ,  C23C16/40 ,  G02B6/10 ,  G02B6/122 ,  G02B6/13 ,  G02B6/132

Abstract: A new material is provided that can be used for the fabrication of planar optical waveguides. The material includes silicon, oxygen and nitrogen and additionally deuterium. Also provided is a method for fabricating planar optical waveguides based on this new material, which uses deuterated gaseous precursors.

公开(公告)号：CA2397845A1

公开(公告)日：2001-09-07

申请号：CA2397845

申请日：2000-11-28

Applicant: IBM

Inventor： BONA GIAN-LUCA ,  GERMANN ROLAND W ,  OFFREIN BERT J ,  SALEMINK HUUB L ,  WIESMANN DOROTHEA W ,  HORST FOLKERT ,  BEYELER RENE ,  BLOCHL PETER

IPC: G02B6/12 ,  C01B21/082 ,  C01B21/087 ,  C03B19/14 ,  C03C1/02 ,  C03C3/04 ,  C03C3/11 ,  C23C16/30 ,  C23C16/40 ,  G02B6/10 ,  G02B6/122 ,  G02B6/13 ,  G02B6/132

Abstract: A new material is provided that can be used for the fabrication of planar optical waveguides. The material includes silicon, oxygen and nitrogen and additionally deuterium. Also provided is a method for fabricating planar optical waveguides based on this new material, which uses deuterated gaseous precursors.