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公开(公告)号:DE1515300A1
公开(公告)日:1969-09-11
申请号:DE1515300
申请日:1964-07-01
Applicant: IBM
Inventor: KAY ERIC , P POENISCH ARTHUR
IPC: C23C14/28 , C23C14/35 , H01J37/34