公开(公告)号：DE2113980A1

公开(公告)日：1971-10-21

申请号：DE2113980

申请日：1971-03-23

Applicant: IBM

Inventor： PAUL HECKER EDWARD ,  EDWARD KULAK JOSEPH ,  MUSITS BELA

IPC: B23Q1/36 ,  H01L21/68 ,  B23Q3/18

Abstract: 1328437 Semi-conductor device manufacture INTERNATIONAL BUSINESS MACHINES CORP 19 April 1971 [6 April 1970] 24630/71 Heading H1K An apparatus for positioning a workpiece e.g. an integrated circuit wafer comprises first and second resilient members deflectable about respective pivots, their free ends being adjacent and forming a floating pivot for a third resilient member, the resultant movement of which is communicated to the workpiece. Means are provided to independently move at least two of the members, which are biased to eliminate backlash. In the embodiment of Fig. 2 each member consists of a pair of leaf springs 19, 20; 26, 27; 31, 32; with spacing members 23, 29, 33 at their free ends each carrying a cam roller 24, 30, 34, members 17 and 18 having fixed pivots 21, 28 respectively. Stepping motors 36, 37, 38 rotate profiled cams 39, 40, 41 to respectively move members 17, 18 in the Y direction and member 12 in the X direction, angular movement being achieved by differential movement of motors 2, 36, 37. The workpiece 10, which is on a table on spacer 33 can be viewed through a microscope and the motors controlled manually to align markers 14 and 15 on the X axis and marker 16 on the Y axis. Alternatively servomotors operate automatically in response to optically detected deviations of the markers from the axes.

公开(公告)号：DE1936013A1

公开(公告)日：1970-01-29

申请号：DE1936013

申请日：1969-07-15

Applicant: IBM

Inventor： WILLE BEUMER KARL ,  PAUL HECKER EDWARD ,  EDWARD NYMAN GEORGE ,  ERNEST POST ROBERT ,  MICHAEL GEANY GERARD ,  ALLAN HARAN JOHN

IPC: H01F41/08

Abstract: A flat multistrand wire is tightly wrapped around a core through utilization of a shuttle having a passage within which the multistrand wire is disposed during winding. The apparatus includes a device for separating each end of the strands of the wire after the wire has been tightly wrapped around the core.