公开(公告)号：US3626769A

公开(公告)日：1971-12-14

申请号：US3626769D

申请日：1970-04-06

Applicant: IBM

Inventor： HECKER EDWARD P ,  KULAK JOSEPH E ,  MUSITS BELA

IPC: B23Q1/36 ,  H01L21/68 ,  F16H25/16

CPC classification number: B23Q1/36 ,  H01L21/68 ,  Y10T74/18208 ,  Y10T74/18568 ,  Y10T74/18856 ,  Y10T74/20207

Abstract: APPARATUS FOR POSITIONING WORKPIECES INCLUDING THREE LEAF SPRING MEMBERS, TWO OF WHICH ARE IN ALIGNMENT, ONE END OF EACH BEING MOUNTED IN A FIXED POSITION AND THE OTHER OR FREE ENDS BEING SPACED FROM AND FACING EACH OTHER. A THIRD MEMBER SUBSTANTIALLY PERPENDICULAR TO THE OTHER TWO ALIGNED MEMBERS IS MOUNTED ON THE FREE ENDS OF BOTH OF SAID OTHER MEMBERS. ACCORDINGLY, THE FIRST TWO MEMBERS ARE DEFLECTABLE ABOUT FIXED PIVOTS WHILE THE THIRD MEMBER IS DEFLECTABLE ABOUT A FLOATING PIVOT FORMED BY THE FREE ENDS OF THE FIRST TWO MEMBERS. THE APPARATUS ALSO INCLUDES FIRST AND SECOND MEANS FOR APPLYING LINEAR FORCES RESPECTIVELY TO SAID FIRST AND SECOND MEMBERS, WHICH FORCES ARE SUBSTANTIALLY PERPENDICULAR TO A FIRST COORDINATE AXIS,

AND MEANS FOR APPLYING TO SAID THIRD MEMBER A LINEAR FORCE WHICH IS SUBSTANTIALLY PERPENDICULAR TO A SECOND COORDINATE AXIS. THE RESULTING DISPLACEMENT OF THE THIRD SPRING MEMBER IS APPLIED TO THE WORKPIECE BEING ORIENTED.

公开(公告)号：DE2626528A1

公开(公告)日：1976-12-30

申请号：DE2626528

申请日：1976-06-14

Applicant: IBM

Inventor： DRUSCHEL WILLIAM OTTO ,  GARDINEER JUN BAYARD GILBERT ,  MANNING STANLEY ARTHUR ,  MUSITS BELA

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G47/74

Abstract: A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.

公开(公告)号：CA1036191A

公开(公告)日：1978-08-08

申请号：CA255047

申请日：1976-06-16

Applicant: IBM

Inventor： DRUSCHEL WILLIAM O ,  GARDINEER BAYARD G JR ,  MANNING STANLEY A ,  MUSITS BELA

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G51/02

Abstract: A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.

公开(公告)号：DE2113980A1

公开(公告)日：1971-10-21

申请号：DE2113980

申请日：1971-03-23

Applicant: IBM

Inventor： PAUL HECKER EDWARD ,  EDWARD KULAK JOSEPH ,  MUSITS BELA

IPC: B23Q1/36 ,  H01L21/68 ,  B23Q3/18

Abstract: 1328437 Semi-conductor device manufacture INTERNATIONAL BUSINESS MACHINES CORP 19 April 1971 [6 April 1970] 24630/71 Heading H1K An apparatus for positioning a workpiece e.g. an integrated circuit wafer comprises first and second resilient members deflectable about respective pivots, their free ends being adjacent and forming a floating pivot for a third resilient member, the resultant movement of which is communicated to the workpiece. Means are provided to independently move at least two of the members, which are biased to eliminate backlash. In the embodiment of Fig. 2 each member consists of a pair of leaf springs 19, 20; 26, 27; 31, 32; with spacing members 23, 29, 33 at their free ends each carrying a cam roller 24, 30, 34, members 17 and 18 having fixed pivots 21, 28 respectively. Stepping motors 36, 37, 38 rotate profiled cams 39, 40, 41 to respectively move members 17, 18 in the Y direction and member 12 in the X direction, angular movement being achieved by differential movement of motors 2, 36, 37. The workpiece 10, which is on a table on spacer 33 can be viewed through a microscope and the motors controlled manually to align markers 14 and 15 on the X axis and marker 16 on the Y axis. Alternatively servomotors operate automatically in response to optically detected deviations of the markers from the axes.

公开(公告)号：DE3479102D1

公开(公告)日：1989-08-31

申请号：DE3479102

申请日：1984-02-08

Applicant: IBM

Inventor： LEVERETT THEODORE WILCOX ,  MUSITS BELA

IPC: B25J15/00 ,  B25J15/04 ,  B25J15/08

Abstract: An object manipulator includes a gripper (15) formed with at least two fingers (24, 25) which are mounted for relative movement so as to be able to grip an object to be manipulated. At least one tool (32) is mounted on a respective one of the fingers and is adapted to engage with the object. The manipulator also includes control means (16) for controlling the relative movement of the fingers. … The tool and its associated finger are formed with cooperating surfaces (36, 37) which allow the tool to be moved in two opposite directions on and off the finger but prevent relative movement between the tool and the finger in any other direction. The cooperating surfaces also cause a frictional force to be exerted on the tool when the finger is gripping an object and this force resists any relative movement between the tool and the finger in the two opposite directions. … The tool and its associated finger are also formed with yieldable means (43, 44, 45) for retaining the tool in position on the finger.

公开(公告)号：FR2324548A1

公开(公告)日：1977-04-15

申请号：FR7614185

申请日：1976-05-06

Applicant: IBM

Inventor： DRUSCHEL WILLIAM O ,  GARDINEER BAYARD G JR ,  MANNING STANLEY A ,  MUSITS BELA

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G51/02 ,  B65G53/04 ,  H05K13/02

Abstract: A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.