公开(公告)号：JP2003114170A

公开(公告)日：2003-04-18

申请号：JP2002207153

申请日：2002-07-16

Applicant: IBM

Inventor： CROW JOHN D ,  PEPELJUGOSKI PETAR ,  SCHAUB JEREMY D

IPC: G01M11/00 ,  G01M11/04 ,  H01S5/00

Abstract: PROBLEM TO BE SOLVED: To provide a test probe by which an optical device can be tested at high speed and efficiently. SOLUTION: An optical testing apparatus comprises an optical fiber having a first numerical aperture at the front end part of the optical fiber. A positioning structure is attached to the optical fiber so that the first end part of the optical fiber is moved up to an arbitrary part on a substrate in order to test the optical device. The optical device can be arranged and installed in an arbitrary position on the substrate, and it supplies a light beam at an emission angle smaller than the first numerical aperture. A test head condenses the light beam via the optical fiber in order to test the optical device. Also a method in which the optical fiber is positioned in order to test the optical device is disclosed.