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公开(公告)号：CA1007760A
公开(公告)日：1977-03-29
申请号：CA202289
申请日：1974-06-12
Applicant: IBM
Inventor： HERDZIK RICHARD J , JEANNOTTE DEXTER A , PETERSON GERALD W , SULLIVAN MICHAEL J
IPC: H01L21/60 , H01L23/485
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