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公开(公告)号：DE3854451D1
公开(公告)日：1995-10-19
申请号：DE3854451
申请日：1988-06-10
Applicant: IBM
Inventor： ROGERS DENNIS L , WOODALL JERRY M , PETTIT GEORGE D , MC INTURFF DAVID T
IPC: H01L31/09 , G01J1/02 , H01L31/00 , H01L31/0304 , H01L31/108 , H01L31/109 , H01L31/10 , H01L31/18
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公开(公告)号：DE3854451T2
公开(公告)日：1996-05-02
申请号：DE3854451
申请日：1988-06-10
Applicant: IBM
Inventor： ROGERS DENNIS L , WOODALL JERRY M , PETTIT GEORGE D , MC INTURFF DAVID T
IPC: H01L31/09 , G01J1/02 , H01L31/00 , H01L31/0304 , H01L31/108 , H01L31/109 , H01L31/10 , H01L31/18
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