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公开(公告)号：DE2627003A1
公开(公告)日：1977-01-27
申请号：DE2627003
申请日：1976-06-16
Applicant: IBM
Inventor： PFEIFFER ALOYSIUS THOMAS , ROMANKIW LUBOMYR TARAS
IPC: G03F1/20 , H01L21/027 , G03F1/00
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