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公开(公告)号：DE1489017A1
公开(公告)日：1970-07-02
申请号：DE1489017
申请日：1964-06-24
Applicant: IBM
Inventor： LEE LANGDON JACK , PH PECORARO RAYMOND
IPC: H01L21/00 , H01L23/29 , H01L23/485 , H01L23/58 , H01L7/16
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