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公开(公告)号:DE2636214A1
公开(公告)日:1977-03-31
申请号:DE2636214
申请日:1976-08-12
Applicant: IBM
Inventor: JOY RICHARD CARLTON , MAGDO INGRID EMESE , PHILLIPS JUN ALFRED
IPC: H01L21/331 , H01L29/73 , H01L29/78
公开(公告)号:DE2636214A1
公开(公告)日:1977-03-31
申请号:DE2636214
申请日:1976-08-12
Applicant: IBM
Inventor: JOY RICHARD CARLTON , MAGDO INGRID EMESE , PHILLIPS JUN ALFRED
IPC: H01L21/331 , H01L29/73 , H01L29/78