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公开(公告)号：JPS58107654A
公开(公告)日：1983-06-27
申请号：JP17650082
申请日：1982-10-08
Applicant: IBM
Inventor： BUARERIA PURATAA , ROURA BII ROSUMAN , POORU EMU SHIYAIPURU , JIERARUDEIN SHII SHIYUWARUTSU
IPC: H01L21/3205 , H01L21/302 , H01L21/3065 , H01L21/3213 , H01L21/48 , H01L21/768 , H01L23/498 , H01L23/532 , H05K3/46
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