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公开(公告)号：JPH0853781A
公开(公告)日：1996-02-27
申请号：JP14773295
申请日：1995-06-14
Applicant: IBM
Inventor： MADABU DATSUTA , RABUINDORA BUAMAN SHIENOI
IPC: C23F1/26 , C23F1/44 , H01L21/28 , H01L21/306 , H01L21/3213 , H01L21/60 , H01L23/485
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