公开(公告)号：DE2724346A1

公开(公告)日：1978-01-05

申请号：DE2724346

申请日：1977-05-28

Applicant: IBM

Inventor： DOUGHERTY JUN WILLIAM EDWIN ,  GREGOR LAWRENCE VINCENT ,  KLEIN DONALD LEE ,  REDMOND THOMAS FRANCIS

IPC: H05K7/20 ,  F25D9/00 ,  G12B15/02 ,  H01L23/427 ,  H01L23/44

Abstract: A device for removing contaminant impurities, particularly contaminants existing at very low levels, from a liquid, including a heating element at least partially immersible in the liquid, a confinement means at least partially immersible in the liquid for maintaining a pulsating bubble of vapor of the liquid, the heating element located within the confining means, openings in the confining means to allow periodic partial escape of the vapor bubble and ingress of liquid.