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公开(公告)号：DE69433769D1
公开(公告)日：2004-06-17
申请号：DE69433769
申请日：1994-03-04
Applicant: IBM
IPC: H01L21/28 , H01L21/3205 , H01L21/768 , H01L23/52 , H05K1/00 , H05K1/03 , H05K3/40 , H05K3/46
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