Patent search ap:("IBM") AND inv:"RESUTAA AARIN PEDAASUN" Page 1

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发明专利
METHOD OF INCREASING CORROSION RESISTANCE FOR REACTIVE ION OR PLASMA ETCHING PROCESS 失效

公开(公告)号：JPS55132041A

公开(公告)日：1980-10-14

申请号：JP370480

申请日：1980-01-18

Applicant: IBM

Inventor： JIEEMUZU EKONOMII , JIEEMUZU RICHIYAADO RIARA , RESUTAA AARIN PEDAASUN

IPC: H01L21/302 , H01L21/027 , H01L21/30 , H01L21/3065

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