METHOD FOR AVOIDING DISHING ON SOFT METAL WIRE HAVING A LARGE WIDTH

    公开(公告)号:JP2000068277A

    公开(公告)日:2000-03-03

    申请号:JP21494799

    申请日:1999-07-29

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To effectively design a semiconductor integrated circuit or an electronic package without considerably increasing complexity of data or reducing wire resistance, by dividing a wide metallic area into metallic stripes. SOLUTION: A physical designing step includes the step of dividing a wide metallic area 4 into metallic stripes 2. The wide metallic area 4 is preferably separated into the stripes 2 which belong to a single wire segment, and vias 6 are inserted only into overlapping parts between metallic layers. An upper metallic layer is provided with an electronic structural element, preferably a C4 pad area 8 for mounting a chip. A blockage is set so as to prevent metallic segments from overlapping the C4 pad area 8. A long power line is divided from an edge to another edge, is formed into stripes on a part on which the C4 pad area 8 is not disposed, and is divided on a part on which the C4 pad area 8 is disposed.

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