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公开(公告)号：JPH0548951B2
公开(公告)日：1993-07-22
申请号：JP1746487
申请日：1987-01-29
Applicant: IBM
IPC: H01L21/76 , H01L21/74 , H01L21/762 , H01L21/8224 , H01L21/8228 , H01L27/082
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