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公开(公告)号:JPS62232140A
公开(公告)日:1987-10-12
申请号:JP1746487
申请日:1987-01-29
Applicant: IBM
IPC: H01L21/76 , H01L21/74 , H01L21/762 , H01L21/8224 , H01L21/8228 , H01L27/082
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公开(公告)号:JPH0548951B2
公开(公告)日:1993-07-22
申请号:JP1746487
申请日:1987-01-29
Applicant: IBM
IPC: H01L21/76 , H01L21/74 , H01L21/762 , H01L21/8224 , H01L21/8228 , H01L27/082
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公开(公告)号:JPS5494843A
公开(公告)日:1979-07-26
申请号:JP14056478
申请日:1978-11-16
Applicant: IBM
IPC: G11C11/405 , G11C11/39 , G11C11/403 , H01L21/8229 , H01L27/07 , H01L27/102
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