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公开(公告)号:JPS63157463A
公开(公告)日:1988-06-30
申请号:JP25987787
申请日:1987-10-16
Applicant: IBM
Inventor: UEI WANGU , SUTANREI EBUERETSUTO SHIYUSUTA , RIYUISU MAJISON TAAMEN
IPC: G11C11/401 , H01L21/74 , H01L21/822 , H01L21/8242 , H01L27/04 , H01L27/10 , H01L27/108