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公开(公告)号:JPH01320224A
公开(公告)日:1989-12-26
申请号:JP9657489
申请日:1989-04-18
Applicant: IBM
Inventor: UIRIAMU JIYOSEFU KARAHAA , EDOWAADO OOGASUTO GIIIZU , ARUNABA GUPUTA , ROBAATO BENJIYAMIN REIBOITSU , YUUJIN JIEN EMU OOSARIBUAN , ROBAATO RII SANDOSUTOROOMU
IPC: C01G3/00 , C01B13/14 , C01G1/00 , C04B41/89 , C30B23/02 , C30B25/18 , C30B29/22 , H01B12/06 , H01B13/00 , H01L39/14 , H01L39/22 , H01L39/24 , H01P3/08