公开(公告)号：JPH1025359A

公开(公告)日：1998-01-27

申请号：JP8623697

申请日：1997-04-04

Applicant: IBM

Inventor： JEFFREY CURTIS HEDRICK ,  JAMES LUPTON HEDRICK ,  YUN C RYAO ,  ROBERT DENIS MILLER ,  TAA YUAN SHII

IPC: C08J9/00 ,  C08J9/26 ,  H05K1/03

Abstract: PROBLEM TO BE SOLVED: To obtain a cellular polymer capable of having extremely small and uniformly dispersed fine pores and suitable for using as an electronic part by performing a reaction comprising three steps by using a precursor of a polysiloxane and heat decomposable particles. SOLUTION: This cellular polysiloxane polymer is obtained by (A) dispersing heat decomposable particles in a polysiloxane precursor, then (B) forming a hard polysiloxane by polymerizing (and preferably crosslinking) the polysiloxane precursor without decomposing the particles, and (C) heating the polysiloxane to decompose to particles without expanding the polysiloxane. Further, the above particles preferably contain a polymethyl methacrylate. The pore diameter of the obtain cellular material is preferably and approximately 1-10μm. Thus, the fine pores are uniformly dispersed in the bulk of the polymer, and the pore diameter can be adjusted by changing the size of the heat decomposable particles.