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公开(公告)号：JPS61251154A
公开(公告)日：1986-11-08
申请号：JP445286
申请日：1986-01-14
Applicant: IBM
IPC: H01L21/76 , H01L21/027 , H01L21/31 , H01L21/312 , H01L21/762
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