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公开(公告)号：DE3674501D1
公开(公告)日：1990-10-31
申请号：DE3674501
申请日：1986-07-28
Applicant: IBM
Inventor： BUMBLE BRUCE , CUOMO JEROME JOHN , LOGAN JOSEPH SKINNER , ROSSNAGEL STEVEN MARK
IPC: H05K3/08 , C23C14/34 , C23F1/04 , C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065
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