公开(公告)号：CA1163602A

公开(公告)日：1984-03-13

申请号：CA404044

申请日：1982-05-28

Applicant: IBM

Inventor： LOGAN JOSEPH S ,  PETVAI STEVE I ,  ROSU CORNEL

IPC: C23C14/42 ,  H01J37/34 ,  C23C15/00

Abstract: A Quadrupole R.F. Sputtering System Having An Anode/Cathode Shield And A Floating Target Shield A quadrupole sputtering system having four electrodes comprised of a cathode, an anode, a cathode/anode shield and an electrically floating target shield circumscribing the source target of the cathode. FI9-81-041

公开(公告)号：DE3278227D1

公开(公告)日：1988-04-14

申请号：DE3278227

申请日：1982-05-12

Applicant: IBM

Inventor： LOGAN JOSEPH SKINNER ,  PETVAI STEVE ISTVAN ,  ROSU CORNEL

IPC: C23C14/42 ,  H01J37/34 ,  C23C14/40

公开(公告)号：BR8203977A

公开(公告)日：1983-07-05

申请号：BR8203977

申请日：1982-07-08

Applicant: IBM

Inventor： LOGAN JOSEPH SKINNER ,  PETVAI STEVE ISTVAN ,  ROSU CORNEL

IPC: C23C14/42 ,  H01J37/34 ,  C23C15/00