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公开(公告)号:DE2304489A1
公开(公告)日:1973-08-16
申请号:DE2304489
申请日:1973-01-31
Applicant: IBM
Inventor: KHOURY HENRI ANTOINE , ROTTMAN HANS RALPH
IPC: H01L21/68 , G03F7/20 , H01L21/02 , H01L21/027 , H01L21/683 , G05D5/00
公开(公告)号:DE2304489A1
公开(公告)日:1973-08-16
申请号:DE2304489
申请日:1973-01-31
Applicant: IBM
Inventor: KHOURY HENRI ANTOINE , ROTTMAN HANS RALPH
IPC: H01L21/68 , G03F7/20 , H01L21/02 , H01L21/027 , H01L21/683 , G05D5/00