Saved successfully
Save failed
Saved Successfully
Save Failed
公开(公告)号:DE3275683D1
公开(公告)日:1987-04-16
申请号:DE3275683
申请日:1982-04-15
Applicant: IBM
Inventor: FOUTS DAVID PERRY , JASPAL JASVIR SINGH , ROUSH WALDEN BENNET , SULLIVAN MICHAEL JAMES
IPC: G01B11/24 , G01B11/30 , H01L21/66