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公开(公告)号：DE3264480D1
公开(公告)日：1985-08-08
申请号：DE3264480
申请日：1982-02-25
Applicant: IBM
Inventor： FOWLER ALAN BICKSLER , ROSENBERG ROBERT , RUPPRECHT HANS STETHAN
IPC: H01L29/80 , H01L21/033 , H01L21/225 , H01L21/338 , H01L29/417 , H01L29/78 , H01L29/812
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