Saved successfully
Save failed
Saved Successfully
Save Failed
公开(公告)号：SE362538B
公开(公告)日：1973-12-10
申请号：SE1582469
申请日：1969-11-18
Applicant: IBM
Inventor： DEPUY A H , KUSCHEL W N , AGUSTA B , SAHNI R J
IPC: D06F15/00 , H01J9/233 , H01L21/00 , H01L21/32 , H01L21/82 , H01L7/64
