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公开(公告)号：CA939829A
公开(公告)日：1974-01-08
申请号：CA89301
申请日：1970-07-28
Applicant: IBM
Inventor： PLATT ALAN , SANDHU JAGTAR J
IPC: H01L21/768 , H01L21/00 , H01L21/28 , H01L21/331 , H01L23/482 , H01L23/485 , H01L29/43 , H01L29/73
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