公开(公告)号：US3421638A

公开(公告)日：1969-01-14

申请号：US3421638D

申请日：1966-11-14

Applicant: IBM

Inventor： LOCKE CHARLES H ,  SANTILLO GEORGE R JR

IPC: B65G47/00 ,  B65G60/00 ,  F26B25/00 ,  B65G57/30 ,  B65G1/00 ,  F26B13/10

CPC classification number: F26B25/001

公开(公告)号：US3499203A

公开(公告)日：1970-03-10

申请号：US3499203D

申请日：1965-05-27

Applicant: IBM

Inventor： CLARK KENDALL ,  BECK GEORGE C ,  CREIGHTON EUGENE J ,  TURRIS FRANK L DE ,  DROP JOSEPH G ,  GODAT JEAN J L ,  LARSEN ARNE H ,  RAJAC THOMAS J ,  SANTILLO GEORGE R JR ,  SCHUELKE WALTER J

IPC: H01L21/00 ,  H01L21/683 ,  H05K13/04 ,  H01R15/00

CPC classification number: H01L21/67236 ,  H01L21/67144 ,  H01L21/6838 ,  H01L24/75 ,  H01L24/81 ,  H01L2224/16225 ,  H01L2924/14 ,  H05K13/0404 ,  H05K13/046 ,  Y10T29/53043 ,  Y10T29/53178 ,  Y10T29/53191 ,  H01L2924/00

公开(公告)号：US3473212A

公开(公告)日：1969-10-21

申请号：US3473212D

申请日：1967-01-20

Applicant: IBM

Inventor： BECK GEORGE C ,  DROP JOSEPH G ,  GODAT JEAN J L ,  LARSEN ARNE H ,  RAJAC THOMAS J ,  SANTILLO GEORGE R JR

IPC: H01L21/00 ,  B23P19/04

CPC classification number: H01L21/67144 ,  Y10T29/53022 ,  Y10T29/53043 ,  Y10T29/53061 ,  Y10T29/53178 ,  Y10T29/53191 ,  Y10T29/53261

公开(公告)号：US3453714A

公开(公告)日：1969-07-08

申请号：US3453714D

申请日：1967-02-10

Applicant: IBM

Inventor： CLARK KENDALL ,  RAJAC THOMAS J ,  SANTILLO GEORGE R JR ,  SCHUELKE WALTER J

IPC: H01L21/00 ,  B65G65/00

CPC classification number: H01L21/67144 ,  Y10T29/53061 ,  Y10T29/53178 ,  Y10T29/53191 ,  Y10T29/53378

公开(公告)号：FR2294816A1

公开(公告)日：1976-07-16

申请号：FR7533263

申请日：1975-10-20

Applicant: IBM

Inventor： SANTILLO GEORGE R JR

IPC: B26F3/00 ,  B28D5/00 ,  B28D5/02 ,  B28D5/04 ,  C04B41/53 ,  C23F1/02 ,  C30B33/00 ,  H01L21/304 ,  B28D5/06 ,  B26D7/08

Abstract: Disclosed is a method and apparatus for thermochemically slicing wafers from a crystal boule by propelling a continuous flow of an acid etching solution against a heated wire which is adjacent the intended line of etch while providing for relative movement between the boule and the chemical etching solution to thereby effect a slicing action of the boule.

公开(公告)号：FR2276095A1

公开(公告)日：1976-01-23

申请号：FR7516539

申请日：1975-05-21

Applicant: IBM

Inventor： PANTUSCO ANTHONY A ,  PINCKNEY WARREN J ,  SANTILLO GEORGE R JR ,  SCHARFF GERARD J

IPC: C30B15/30 ,  H01L21/208 ,  B01J17/20

公开(公告)号：CA853028A

公开(公告)日：1970-10-06

申请号：CA853028D

Applicant: IBM

Inventor： LOCKE CHARLES H ,  SANTILLO GEORGE R JR