Patent search ap:("IBM") AND inv:"SCHAD ROBERT GERARD" Page 1

1.

发明专利
USE OF A CONDUCTIVE ORGANIC CHARGE TRANSFER MATERIAL AS ELECTRON BEAM SENSITIVE RESIST COMPOSITION, AND METHOD OF FORMING POSITIVE AND NEGATIVE RESIST IMAGES 未知

公开(公告)号：DE3066749D1

公开(公告)日：1984-04-05

申请号：DE3066749

申请日：1980-07-18

Applicant: IBM

Inventor： ENGLER EDWARD MARTIN , KUPTSIS JOHN DEMOSTHENES , SCHAD ROBERT GERARD , TOMKIEWICZ YAFFA

IPC: G03F7/004 , G03F7/038 , G03F7/039 , G03C1/72 , G03C1/68

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