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公开(公告)号：FR2312816A1
公开(公告)日：1976-12-24
申请号：FR7610161
申请日：1976-04-01
Applicant: IBM
Inventor： PATRICK WILLIAM J , SCILLA SALVATORE J , WESTDORP WOLFGANG A
IPC: C01B33/02 , C01B33/021 , C30B15/00 , C30B15/10 , C30B29/06 , H01L21/208 , G05D11/00 , B01J17/20
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