公开(公告)号：FR2328509A1

公开(公告)日：1977-05-20

申请号：FR7623756

申请日：1976-07-28

Applicant: IBM

Inventor： PATRICK WILLIAM J ,  WESTDORP WOLFGANG A

IPC: C01B33/02 ,  C30B15/00 ,  C30B15/20 ,  C30B29/06 ,  H01L21/208 ,  B01J17/00

公开(公告)号：FR2312816A1

公开(公告)日：1976-12-24

申请号：FR7610161

申请日：1976-04-01

Applicant: IBM

Inventor： PATRICK WILLIAM J ,  SCILLA SALVATORE J ,  WESTDORP WOLFGANG A

IPC: C01B33/02 ,  C01B33/021 ,  C30B15/00 ,  C30B15/10 ,  C30B29/06 ,  H01L21/208 ,  G05D11/00 ,  B01J17/20

公开(公告)号：CA1067800A

公开(公告)日：1979-12-11

申请号：CA263823

申请日：1976-10-20

Applicant: IBM

Inventor： PATRICK WILLIAM J ,  WESTDORP WOLFGANG A

IPC: C01B33/02 ,  C30B15/00 ,  C30B15/20 ,  C30B29/06 ,  H01L21/208 ,  B01J17/18

Abstract: CONTROL OF OXYGEN IN SILICON CRYSTALS The seed to tail oxygen concentration gradient in silicon crystals, which are drawn from a silicon melt contained in a silica vessel according to the Czochralski process, is controlled by a process employing stop-go crucible rotation to provide fluid shearing at the melt-crucible interface.