公开(公告)号：JP2000331634A

公开(公告)日：2000-11-30

申请号：JP2000109631

申请日：2000-04-11

Applicant: IBM

Inventor： PFEIFFER HANS C ,  SENESI JOSEPH S ,  STURANS MARIS ANDRIS

IPC: G03F7/20 ,  H01J37/141 ,  H01J37/21 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a magnetic lens having a dynamic focus coil. SOLUTION: A magnetic lens 60 having a lens opening for passing a particle beam includes a dynamic focus coil 22 placed outside the lens opening in magnetic pole pieces shaping a lens magnetic field. All magnetic flux lines from the dynamic focus coil form a closed circuit on the magnetic pole pieces of the lend, and the magnitude of the shape of the lens magnetic field between magnetic pole pieces is changed according to a current flowing through the dynamic focus coil. The shape of a magnetic field does not change, thereby changing a focal surface of the beam without moving laterally the beam with respect to a system axis 101.

公开(公告)号：DE60039810D1

公开(公告)日：2008-09-25

申请号：DE60039810

申请日：2000-03-18

Applicant: IBM

Inventor： PFEIFFER HANS C ,  SENESI JOSEPH S ,  STURANS MARIS ANDRIS

IPC: G03F7/20 ,  H01J37/141 ,  H01J37/21 ,  H01L21/027

Abstract: A magnetic lens having a lens bore for the passage of a particle beam includes a dynamic focus coil that is positioned outside the lens bore and within the pole piece that shapes the lens field, so that the magnetic flux lines from the dynamic focus coil all end on the pole pieces of the lens and the shape of the lens field between the pole pieces has its magnitude changed by the current passing through the dynamic focus coil, but the field shape is not changed, thus changing the focal plane of the beam without moving the beam transversely with respect to the system axis.

公开(公告)号：AT404990T

公开(公告)日：2008-08-15

申请号：AT00105805

申请日：2000-03-18

Applicant: IBM

Inventor： PFEIFFER HANS C ,  SENESI JOSEPH S ,  STURANS MARIS ANDRIS

IPC: G03F7/20 ,  H01J37/141 ,  H01J37/21 ,  H01L21/027

Abstract: A magnetic lens having a lens bore for the passage of a particle beam includes a dynamic focus coil that is positioned outside the lens bore and within the pole piece that shapes the lens field, so that the magnetic flux lines from the dynamic focus coil all end on the pole pieces of the lens and the shape of the lens field between the pole pieces has its magnitude changed by the current passing through the dynamic focus coil, but the field shape is not changed, thus changing the focal plane of the beam without moving the beam transversely with respect to the system axis.