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公开(公告)号:JPH05182518A
公开(公告)日:1993-07-23
申请号:JP13440092
申请日:1992-04-28
Applicant: IBM
Inventor: SHIYAAMA PURASADO MUKEERUJIEE , DEIBITSUDO UEI WAN
Abstract: PURPOSE: To provide low dielectric constant aerogel minute granular matter- containing composite resin which is applied to a board surface such as a ceramic or multilayer ceramic board and can be photolithographically processed when the resin is photosensitive polymer. CONSTITUTION: Low cost material which contains aerogel minute spherical bodies uniformly distributed so as to have molecular, dimension (nano-scale) gaps, and has a low dielectric constant, and of which a thermal expansion rate is controlled is manufactured by extruding, standard impregnating, and laminating technology. Aerosol minute spherical bodies are manufactured by sol-gel technology and supercritical drying of sol-gel particulates. By using lamination containing the material, through holes can be finely made so that the same can be used as a board for a surface mounting device.