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公开(公告)号:DE3672174D1
公开(公告)日:1990-07-26
申请号:DE3672174
申请日:1986-07-04
Applicant: IBM
Inventor: CHRISTIE ROSEMARY , HWANG BAO-TAI , KU SAN-MEI , SICKLER JANET MARION
IPC: H01L21/76 , H01L21/306 , H01L21/308 , H01L21/316 , H01L21/762
公开(公告)号:DE3672174D1
公开(公告)日:1990-07-26
申请号:DE3672174
申请日:1986-07-04
Applicant: IBM
Inventor: CHRISTIE ROSEMARY , HWANG BAO-TAI , KU SAN-MEI , SICKLER JANET MARION
IPC: H01L21/76 , H01L21/306 , H01L21/308 , H01L21/316 , H01L21/762