Abstract:
A first or primary field effect transistor ('FET') (620) is separated from a body contact thereto by one or more second FETs (632) that are placed electrically in parallel with the first FET (620). In this way, the body of the first FET (620) can be extended into the region occupied by the second FET (632) to allow contact to be made to the body of the first FET (620). In one embodiment, the gate conductor of the first FET (620) and a gate conductor of the second FET (632) are integral parts of a unitary conductive pattern. The unitary conductive pattern is made desirably small, and can be made as small as the smallest predetermined linewidth for gate conductors on an integrated circuit which includes the body-contacted FET. In this way, area and parasitic capacitance are kept small.
Abstract:
A first or primary field effect transistor ("FET") (620) is separated from a body contact thereto by one or more second FETs (632) that are placed electrically in parallel with the first FET (620). In this way, the body of the first FET (620) can be extended into the region occupied by the second FET (632) to allow contact to be made to the body of the first FET (620). In one embodiment, the gate conductor of the first FET (620) and a gate conductor of the second FET (632) are integral parts of a unitary conductive pattern. The unitary conductive pattern is made desirably small, and can be made as small as the smallest predetermined linewidth for gate conductors on an integrated circuit which includes the body-contacted FET. In this way, area and parasitic capacitance are kept small.
Abstract:
Disclosed is a type "BC" body contacted SOI transistor and process for making these transistors in a manufacturing environment by providing a structure and process which removes overlay tolerance from the effective transistor width. The width is determined by RX on the top side, but by PC on the other with source and drain connected together. In the preferred embodiment such a structure is used as the top part of the SOI transistor with the bottom part a mirror image of the top part such that the effect of the PC to RX overlay is reversed, and the top part and bottom part are connected by a common body part. For the bottom part an "UP misalignment will make the device with large, while a "DOWN" misalignment will make the device width smaller. Thus, if PC is misalleged with respect to RX, any width errors introduced in the top part of the transistor will be exactly canceled by the bottom part of the transistor. An alternative DOG BONE embodiment is also illustrated which also provides a structure which removes the overlay tolerance from the effective transistor width.