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公开(公告)号：DE2363466A1
公开(公告)日：1974-07-04
申请号：DE2363466
申请日：1973-12-20
Applicant: IBM
Inventor： GARNACHE RICHARD RAYMOND , SMITH JUN WILLIAM MICHAEL
IPC: H01L21/225 , H01L23/522 , H01L27/07 , H01L27/108 , H01L19/00
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