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公开(公告)号：DE3576752D1
公开(公告)日：1990-04-26
申请号：DE3576752
申请日：1985-04-26
Applicant: IBM
Inventor： STOLL ERICH PAUL DR
Abstract: The scanning acoustic microscope comprises a solid lens body (1) consisting of two sections (2, 5) of materials having different sound propagation characteristics but matching acoustic impedances. A lens (4) is arranged at the interface (3) of said sections (2, 5) having its focal point falling into the apex (8) of a sharply pointed tip (7) formed at the free surface of one (5) of the sections. Tip (7) and specimen (10) to be investigated are immersed in a coupling medium (9) having a relatively high absorption coefficient. The lens body (1) carries a transducer (11) on its surface (6) opposite the tip (7) for sending plane sound waves through said lens (4) and said tip (7) onto the specimen (10). The reflected and transmitted waves are received by the transducer (11) attached to the lens body (1) and a transducer (21) arranged on the rear side of the specimen, respectively. By appropriate processing of their output signals, high-resolution (10 nm) images of the specimen (10) can be obtained.
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公开(公告)号：DE3477271D1
公开(公告)日：1989-04-20
申请号：DE3477271
申请日：1984-12-28
Applicant: IBM
Abstract: The waveguide comprises a transparent body (13) having a very sharp point at one end and being coated with a first opaque layer (14) such as metal. Said opaque layer (14) carries a layer (15) of an optically transparent material which, in turn, is covered by a second opaque layer (16). The apex of the point is removed so as to expose said transparent body (13) in a first aperture (18) and to expose said transparent layer (15) in a second aperture 17, said first aperture occupying an area below 0,01µm 2 .Light entering the transparent body (13) from its remote end is shone onto an object (4), the reflected light enters said second aperture (17) and is guided to a light detector (19) for further processing.
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