公开(公告)号：JPH04305148A

公开(公告)日：1992-10-28

申请号：JP14426091

申请日：1991-04-18

Applicant: IBM

Inventor： JIEROOMU JIYON KUOMO ,  JIEFURII DONARUDO GEROORUMU ,  MAIKERU HATSUAKISU JIYUNIA ,  DEIBUITSUDO ANDORIYUU RUISU ,  JIEEN MAAGARETSUTO SHIYOO ,  SUTANREI JIYOSEFU HOWAITOHEAA

IPC: B01J19/12 ,  C08G73/10 ,  G01N22/00 ,  H01L21/312 ,  H05B6/68 ,  H05B6/80 ,  H05K1/03 ,  H05K3/46

Abstract: PURPOSE: To make it possible to obtain a product having no defect in the shortest time by emitting microwave power for expediting a physical process or chemical reaction. CONSTITUTION: To perform the maximum resonance of a system varying with time during reaction, a tuning type microwave resonance cavity 2 is tuned by vertically moving a short bar 10 and inserting or drawing a microwave probe 22 into or from the cavity. For example, power of level P1 to P4 is emitted to solvent dissolved polyamic acid precursor covering the plate arranged at the bottom wall 8 of the cavity 2. First, the solvent is evaporated from a thin film, then to sequentially increase the Q value (quality factor) so that the imide rate is increased to become complete imide compound, the power is emitted for four time intervals.