公开(公告)号：JP2003266308A

公开(公告)日：2003-09-24

申请号：JP2002055746

申请日：2002-03-01

Applicant: IBM

Inventor： SHINOHARA MASAKI ,  TANAKA SHUNSUKE ,  ISHIMOTO KOICHI

IPC: B24B57/02 ,  B24B37/00 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To provide a slurry supply pipe and a retention preventing method which can reduce costs for CMP by reducing the amount of slurry to be discarded and by reducing a process time for CMP. SOLUTION: This slurry supply pipe 1 comprises a T-shaped joint 2 connected in the middle of a circulation path L, a movable pipe 3 rotatably connected to a branch pipe 20 of the T-shaped joint 2, and a driving means 4 for rotating the movable pipe 3. The driving means 4 rotates each of two rollers 40 supporting the outer circumferential face of the movable pipe 3 from below clockwise to have the movable pipe driven in the same direction. Each of the rollers 40 is connected to a rotating machine. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2003251563A

公开(公告)日：2003-09-09

申请号：JP2002055665

申请日：2002-03-01

Applicant: IBM

Inventor： TANAKA SHUNSUKE ,  SHINOHARA MASAKI ,  ISHIMOTO KOICHI

IPC: B24B57/02 ,  B24B57/00 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To provide a slurry collection device which can save the quantity of the slurry to be disposed and can suppress any stuffing of a discharge pipe to discharge the slurry, and also to provide a method therefor. SOLUTION: The slurry collection device 1 includes an annular shielding member 2 disposed around a turntable T of a grinding device E, and an annular slurry collector 3 disposed around the shielding member 2. The turntable T is connected to an upper end of a main rotary shaft T1 protruded from a bottom part of a sink S of the grinding device E, and raised from the bottom part of the sink S. The slurry collection device 1 is inserted between the entire circumference of the turntable T and the inner surface of the sink S. COPYRIGHT: (C)2003,JPO