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公开(公告)号:JPS567450A
公开(公告)日:1981-01-26
申请号:JP6077580
申请日:1980-05-09
Applicant: IBM
Inventor: TATSUKU HANGU NINGU , JIIGUFURIIDO KURUTO BUIIDOMAN
IPC: H01L21/8222 , H01L21/28 , H01L21/768 , H01L23/522 , H01L23/532 , H01L27/06 , H01L29/43
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公开(公告)号:JPH0644568B2
公开(公告)日:1994-06-08
申请号:JP5129984
申请日:1984-03-19
Applicant: IBM
IPC: H01L21/331 , H01L21/74 , H01L21/8222 , H01L21/8224 , H01L21/8228 , H01L27/082 , H01L29/73 , H01L29/732 , H01L29/735
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公开(公告)号:JPS6045064A
公开(公告)日:1985-03-11
申请号:JP5129984
申请日:1984-03-19
Applicant: IBM
IPC: H01L21/331 , H01L21/74 , H01L21/8222 , H01L21/8224 , H01L21/8228 , H01L27/082 , H01L29/73 , H01L29/732 , H01L29/735
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公开(公告)号:JPS54157089A
公开(公告)日:1979-12-11
申请号:JP4553879
申请日:1979-04-16
Applicant: IBM
Inventor: AANESUTO BATSUSAUSU , TATSUKU HANGU NINGU , KAARUTON MOORISU OZUBAAN
IPC: H01L21/033 , H01L21/265 , H01L21/336 , H01L21/8247 , H01L29/10 , H01L29/78 , H01L29/788 , H01L29/792
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公开(公告)号:JPS587862A
公开(公告)日:1983-01-17
申请号:JP6484582
申请日:1982-04-20
Applicant: IBM
IPC: H01L29/73 , H01L21/28 , H01L21/331 , H01L29/40 , H01L29/41 , H01L29/417 , H01L29/43 , H01L29/72 , H01L29/732
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