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公开(公告)号：DE3777433D1
公开(公告)日：1992-04-23
申请号：DE3777433
申请日：1987-04-01
Applicant: IBM
Inventor： FOWLER ALAN BICKSLER , TIMP GREGORY LOUIS
IPC: H01L29/80 , H01L21/338 , H01L29/205 , H01L29/66 , H01L29/775 , H01L29/778 , H01L29/812 , H01L45/02 , H01L29/76 , G02F1/015 , H01L29/10
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