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公开(公告)号：BR8903288A
公开(公告)日：1990-02-13
申请号：BR8903288
申请日：1989-07-04
Applicant: IBM
Inventor： KUECH THOMAS FRANCIS , TISCHLER MICHAEL ALBERT
IPC: H01L21/205 , C30B25/02 , H01L21/20
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