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公开(公告)号：DE3463590D1
公开(公告)日：1987-06-11
申请号：DE3463590
申请日：1984-06-20
Applicant: IBM
Inventor： KHOURY HENRI ANTOINE , TOMPKINS BRUCE EDWARD
IPC: H01L21/68 , B65D85/57 , B65D85/86 , G05D3/00 , H01L21/67 , H01L21/673 , H01L21/677 , H05K13/00
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