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公开(公告)号：PL348207A1
公开(公告)日：2002-05-06
申请号：PL34820799
申请日：1999-12-01
Applicant: IBM
Inventor： TSUJIMIRA TAKATOSHI , MIYAMOTO TAKASHI
IPC: G02F1/1343 , H01L21/3213 , H01L31/18 , H05K1/02 , H05K3/06 , H01B13/00 , G03F7/038 , H01L21/28
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