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公开(公告)号:US3411122A
公开(公告)日:1968-11-12
申请号:US52053466
申请日:1966-01-13
Applicant: IBM
Inventor: SCHILLER JULIUS M , TURETZKY MELVIN N
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公开(公告)号:CA973979A
公开(公告)日:1975-09-02
申请号:CA150293
申请日:1972-08-24
Applicant: IBM
Inventor: LANGSTON PERRY R JR , TURETZKY MELVIN N
Abstract: A process for forming a glass interconnection package for semiconductor chips including the steps of depositing a first layer of glass material on a supporting substrate and then heating the layer in a first gaseous ambient which is soluble in the glass material. Immediately thereafter, the first gaseous ambient is replaced by a second gaseous ambient which is insoluble in the glass material and the glass layer is heated and then cooled down to ambient atmosphere.
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公开(公告)号:CA978278A
公开(公告)日:1975-11-18
申请号:CA150295
申请日:1972-08-24
Applicant: IBM
Inventor: GREENSTEIN BERNARD , LANGSTON PERRY R JR , NARKEN BERNT , TURETZKY MELVIN N
IPC: H05K3/46 , H01L20060101 , H01L21/48 , H01L23/08 , H01L23/15 , H01L23/538 , H05K3/00 , H01L
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公开(公告)号:CA813498A
公开(公告)日:1969-05-20
申请号:CA813498D
Applicant: IBM
Inventor: SCHILLER JULIUS M , TURETZKY MELVIN N
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