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1.发明专利
公开(公告)号：CA1019466A
公开(公告)日：1977-10-18
申请号：CA213807
申请日：1974-11-15
Applicant: IBM
Inventor： BAKER THEODORE H , STEVENS RICHARD C , TZOU ALBERT J
IPC: H01L21/66 , G01R27/02 , G01R31/26 , H01L21/027 , H01L21/28
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