-
公开(公告)号：DE3064246D1
公开(公告)日：1983-08-25
申请号：DE3064246
申请日：1980-06-24
Applicant: IBM
Inventor： GHEZ RICHARD ANGELO , GUNN JOHN BATTISCOMBE , HAMMER ROBERT , VAN VECHTEN JAMES ALDEN
Abstract: A pressure differential is provided across substrate 1 having hole 21A-G to be etched to a specific dimension by means of an etchant which forms menisci extending across each hole opening 22A-G. The etchant is retained in each hole due to its surface tension and under the pressure differential is drawn partly through hole openings 22A-G. When hole openings 22A-G reach the specific desired dimension, the etchant is drawn out of the holes by the pressure differential and etching stops.
Search Results
1
records
(took 0.016 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
