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公开(公告)号：DE69026118T2
公开(公告)日：1996-10-02
申请号：DE69026118
申请日：1990-11-21
Applicant: IBM
Inventor： DAS GOBINDA , VIAU THOMAS , BERNDLMAIER ERICH
IPC: H01L21/60 , H01L21/603 , H01L23/485
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公开(公告)号：DE69026118D1
公开(公告)日：1996-04-25
申请号：DE69026118
申请日：1990-11-21
Applicant: IBM
Inventor： DAS GOBINDA , VIAU THOMAS , BERNDLMAIER ERICH
IPC: H01L21/60 , H01L21/603 , H01L23/485
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